Synthesis and Evaluation of Pure-Silica-Zeolite BEA as Low Dielectric Constant Material for Microprocessors
- 31 December 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in Industrial & Engineering Chemistry Research
- Vol. 43 (12), 2946-2949
- https://doi.org/10.1021/ie034062k
Abstract
No abstract availableKeywords
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