Progress and future directions for atomic layer deposition and ALD-based chemistry
- 18 November 2011
- journal article
- Published by Springer Science and Business Media LLC in MRS Bulletin
- Vol. 36 (11), 865-871
- https://doi.org/10.1557/mrs.2011.238
Abstract
No abstract availableKeywords
This publication has 40 references indexed in Scilit:
- An Alternative Route Towards Metal–Polymer Hybrid Materials Prepared by Vapor‐Phase ProcessingAdvanced Functional Materials, 2011
- Metal Infiltration into Biomaterials by ALD and CVD: A Comparative StudyChemphyschem, 2011
- Atomic Layer Deposition of Ta2O5/Polyimide NanolaminatesChemical Vapor Deposition, 2009
- Atomic Layer Deposition on Electrospun Polymer Fibers as a Direct Route to Al2O3 Microtubes with Precise Wall Thickness ControlNano Letters, 2007
- Ultrahigh x-ray reflectivity from W∕Al2O3 multilayers fabricated using atomic layer depositionApplied Physics Letters, 2006
- Design, production and characterization of polymeric microparticles containing vitamins for in vitro cell treatment on lab-on-a-chipChemical Industry and Chemical Engineering Quarterly, 2006
- Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water processJournal of Applied Physics, 2005
- Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer DepositionChemistry of Materials, 2003
- Reaction of Al(tBu)3 with Ethylene Glycol: Intermediates to Aluminum Alkoxide (Alucone) Preceramic PolymersChemistry of Materials, 1999
- Copper-the Major Metal Component of Glycerid Polychaete JawsJournal of the Marine Biological Association of the United Kingdom, 1980