Solid-State Dewetting of Thin Films
- 4 August 2012
- journal article
- Published by Annual Reviews in Annual Review of Materials Research
- Vol. 42 (1), 399-434
- https://doi.org/10.1146/annurev-matsci-070511-155048
Abstract
Solid films are usually metastable or unstable in the as-deposited state, and they will dewet or agglomerate to form islands when heated to sufficiently high temperatures. This process is driven by surface energy minimization and can occur via surface diffusion well below a film's melting temperature, especially when the film is very thin. Dewetting during processing of films for use in micro- and nanosystems is often undesirable, and means of avoiding dewetting are important in this context. However, dewetting can also be useful in making arrays of nanoscale particles for electronic and photonic devices and for catalyzing growth of nanotubes and nanowires. Templating of dewetting using patterned surface topography or prepatterning of films can be used to create ordered arrays of particles and complex patterns of partially dewetted structures. Studies of dewetting can also provide fundamental new insight into the effects of surface energy anisotropy and facets on shape evolution.Keywords
This publication has 101 references indexed in Scilit:
- Requirements for graphoepitaxial alignment through solid-state dewetting of Au filmsJournal of Applied Physics, 2011
- Solid-state dewetting of patterned thin filmsApplied Physics Letters, 2009
- Tuning of Vertically-Aligned Carbon Nanotube Diameter and Areal Density through Catalyst Pre-TreatmentNano Letters, 2008
- Linear arrays of CaF2 nanostructures on SiApplied Physics Letters, 1999
- Spinodal Dewetting of Thin Polymer FilmsPhysical Review Letters, 1998
- Shape evolution by surface diffusion and surface attachment limited kinetics on completely faceted surfacesActa Metallurgica et Materialia, 1995
- Capillary instabilities in polycrystalline metallic foils: Experimental observations of thermal pitting in nickelActa Metallurgica et Materialia, 1994
- Simulation of thin film grain structures—I. Grain growth stagnationActa Metallurgica et Materialia, 1990
- Stability of rods with anisotropic surface free energyScripta Metallurgica, 1979
- Kinetics of hillock and island formation during annealing of thin silver filmsProgress in Surface Science, 1972