Si–Zr–C–N-based hydrophobic plasma polymer membranes for small gas molecule separation
- 1 January 2013
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 527, 87-91
- https://doi.org/10.1016/j.tsf.2012.12.004
Abstract
No abstract availableKeywords
Funding Information
- National Center for Scientific Research (Programme Interdisciplinaire Energie “MENOXHY”)
- Carnot Institute of Montpellier (France) “Chimie, Environnement et Développement Durable (CED2)”
This publication has 22 references indexed in Scilit:
- 2-Step plasma-enhanced CVD for low-temperature fabrication of silica membranes with high gas-separation performanceChemical Communications, 2011
- CO2-Resistant Hydrogen Permeation Membranes Based on Doped Ceria and NickelThe Journal of Physical Chemistry C, 2010
- Palladium and palladium alloy membranes for hydrogen separation and production: History, fabrication strategies, and current performanceSeparation and Purification Technology, 2010
- Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separationJournal of Membrane Science, 2009
- Hydrogen permeation characteristics and stability of Ni-doped silica membranes in steam at high temperatureJournal of Membrane Science, 2006
- Methane steam reforming by microporous catalytic membrane reactorsAIChE Journal, 2004
- Pyrolytic carbon–silica membrane: a promising membrane material for improved gas separationJournal of Membrane Science, 2003
- Palladium and palladium alloy composite membranes prepared by metal-organic chemical vapor deposition method (cold-wall)Journal of Membrane Science, 2000
- Deposition and optical studies of silicon carbide nitride thin filmsThin Solid Films, 2000
- Preparation, properties, and crystal structures of the monochlorotris[bis(trimethylsilyl)amido]-compounds of titanium, zirconium, and hafniumJ. Chem. Soc., Dalton Trans., 1980