ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications
- 2 April 2007
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 90 (14)
- https://doi.org/10.1063/1.2719149
Abstract
Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au/ZnO/Pt) and a Bragg reflector (ZnO/Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94 GHz) and mass sensitivity (8970 Hz cm²/ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies.Department of Applied PhysicsAuthor name used in this publication: G. K. H. PanKeywords
This publication has 19 references indexed in Scilit:
- Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic filmsSensors and Actuators B: Chemical, 2006
- A comprehensive review of ZnO materials and devicesJournal of Applied Physics, 2005
- Fabrication and Characterization of ZnO-Based Film Bulk Acoustic Resonator with a High Working FrequencyChinese Physics Letters, 2005
- Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonatorsJournal of the European Ceramic Society, 2004
- A feasibility study of ZnO‐based FBAR devices for an ultra‐mass‐sensitive sensor applicationMicrowave and Optical Technology Letters, 2004
- Ultimate limits to inertial mass sensing based upon nanoelectromechanical systemsJournal of Applied Physics, 2004
- A review of thin-film resonator technologyIEEE Microwave Magazine, 2003
- Materials for bulk acoustic wave (BAW) resonators and filtersJournal of the European Ceramic Society, 2001
- A quartz crystal biosensor for measurement in liquidsBiosensors and Bioelectronics, 1992
- Introduction, History, and Overview of Applications of Piezoelectric Quartz Crystal MicrobalancesPublished by Elsevier BV ,1984