Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films
- 26 April 2006
- journal article
- Published by Elsevier BV in Sensors and Actuators B: Chemical
- Vol. 114 (2), 681-686
- https://doi.org/10.1016/j.snb.2005.04.047
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applicationsApplied Physics Letters, 1999
- Use of the quartz crystal microbalance to measure the mass of submonolayer deposits: Measuring the stoichiometry of surface oxidesJournal of Vacuum Science & Technology A, 1998
- Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layersSmart Materials and Structures, 1997
- Acoustic Wave Sensors and ResponsesPublished by Elsevier BV ,1997
- Thin aluminum nitride film resonators: miniaturized high sensitivity mass sensorsAnalytical Chemistry, 1992
- A quartz crystal biosensor for measurement in liquidsBiosensors and Bioelectronics, 1992
- The measurement of cathode evaporation rate by quartz crystal microbalanceJournal of Vacuum Science & Technology A, 1991
- General one-dimensional treatment of the layered piezoelectric resonator with two electrodesThe Journal of the Acoustical Society of America, 1987
- ZnO/SiO2-diaphragm composite resonator on a silicon waferElectronics Letters, 1981
- Fundamental-mode VHF/UHF minature acoustic resonators and filters on siliconApplied Physics Letters, 1980