Design and use of compact lensed fibers for low cost packaging of optical MEMS components
- 14 July 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (10), 1367-1375
- https://doi.org/10.1088/0960-1317/14/10/011
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Silicon-based coupling platform for optical fiber switching in free spaceJournal of Micromechanics and Microengineering, 2003
- MEMS' Rocky RoadMechanical Engineering, 2002
- Micromachining for optical and optoelectronic systemsProceedings of the IEEE, 1997
- Comb-drive actuators for large displacementsJournal of Micromechanics and Microengineering, 1996
- Fundamentals of PhotonicsPublished by Wiley ,1991
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989