Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
- 1 August 1997
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 82 (3), 980-984
- https://doi.org/10.1063/1.365936
Abstract
We report a new method of achieving tip–sample distance regulation in an atomic force microscope (AFM). A piezoelectric quartz tuning fork serves as both actuator and sensor of tip–sample interactions, allowing tip–sample distance regulation without the use of a diode laser or dither piezo. Such a tuning fork has a high spring constant so a dither amplitude of only 0.1 nm may be used to perform AFM measurements. Tuning-fork feedback is shown to operate at a noise level as low as that of a cantilever-based AFM. Using phase-locked-loop control to track excursions in the resonant frequency of a 32 kHz tuning fork, images are acquired at scan rates which are fast enough for routine AFM measurements. Magnetic force microscopy using tuning-fork feedback is demonstrated.Keywords
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