Pt surface modification of SnO2 nanorod arrays for CO and H2 sensors
- 19 May 2010
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Nanoscale
- Vol. 2 (7), 1203-1207
- https://doi.org/10.1039/c0nr00159g
Abstract
Uniform SnO2 nanorod arrays were deposited on a 4 inch SiO2/Si wafer by plasma-enhanced chemical vapor deposition (PEVCD) at low deposition temperature of around 300 °C. The SnO2 nanorods were connected at the roots, thus the nanorod sensors could be fabricated by a feasible way compatible with microelectronic processes. The surface of the sensors was modified by Pt nanoparticles deposited by dip coating and sputtering, respectively. The sensing properties of the Pt-modified SnO2 nanorod sensors to CO and H2 gases were comparatively studied. After surface modification of Pt, the sensing response to CO and H2 gases increased dramatically. The 2 nm Pt-modified SnO2 nanorod sensors by sputtering showed the best sensing performance. By increasing Pt thickness from 2 nm up to 20 nm, the optimal working temperature decreased by 30 °C while the sensing response also decreased by about 4 times. Comparing these two Pt modification approaches by dip coating and sputtering, both could achieve comparable promotion effect if the Pt thickness can be controlled around its optimal value. The deposition technique of SnO2 nanorod arrays by PECVD has good potential for scale-up and the fabrication process of nanorod sensors possesses simplicity and good compatibility with contemporary microelectronics-based technology.This publication has 21 references indexed in Scilit:
- Hydrogen sensors made of undoped and Pt-doped SnO2 nanowiresJournal of Alloys and Compounds, 2009
- High sensitivity SnO2single-nanorod sensors for the detection of H2gas at low temperatureNanotechnology, 2009
- Chemical Sensors and Electronic Noses Based on 1-D Metal Oxide NanostructuresIEEE Transactions on Nanotechnology, 2008
- The template-free synthesis of square-shaped SnO2nanowires: the temperature effect and acetone gas sensorsNanotechnology, 2008
- SnO2 Nanoribbons as NO2 Sensors: Insights from First Principles CalculationsNano Letters, 2003
- Detection of CO and O2 Using Tin Oxide Nanowire SensorsAdvanced Materials, 2003
- Nanobelts, Nanowires, and Nanodiskettes of Semiconducting Oxides—From Materials to NanodevicesAdvanced Materials, 2003
- Novel Nanostructures of Functional Oxides Synthesized by Thermal EvaporationAdvanced Functional Materials, 2003
- Photochemical Sensing of NO2 with SnO2 Nanoribbon Nanosensors at Room TemperatureAngewandte Chemie, 2002
- Tin Oxide Nanowires, Nanoribbons, and NanotubesThe Journal of Physical Chemistry B, 2002