High sensitivity SnO2single-nanorod sensors for the detection of H2gas at low temperature

Abstract

Uniform SnO(2) nanorods were grown by inductively coupled plasma-enhanced chemical vapor deposition without catalysts and additional heating. The SnO(2) nanorods were aligned on a pair of Au/Ti electrodes by the dielectrophoresis method. SnO(2) single-nanorod gas sensors were fabricated by connecting individual SnO(2) nanorods to a pair of Au/Ti electrodes with Pt stripes deposited by a focused ion beam. The sensing properties of the SnO(2) single-nanorod sensor were studied. The SnO(2) single-nanorod sensor could detect 100 ppm H(2) at room temperature with repeated response and showed a large change of resistance, fast response time and good reversibility at an elevated operating temperature of 200 degrees C. The optimal sensing performance of the sensor is achieved at the operating temperature of around 250 degrees C.