In situ monitoring of sputtered zinc oxide films for piezoelectric transducers
- 13 September 1999
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 352 (1-2), 179-184
- https://doi.org/10.1016/s0040-6090(99)00329-6
Abstract
No abstract availableKeywords
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- Large area piezoelectric ZnO film transducers produced by r.f. diode sputteringThin Solid Films, 1991
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