Large area piezoelectric ZnO film transducers produced by r.f. diode sputtering
- 1 June 1991
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 201 (2), 293-304
- https://doi.org/10.1016/0040-6090(91)90118-h
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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