Modelling the dynamics of a MEMS resonator: Simulations and experiments
- 10 March 2008
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 142 (1), 306-315
- https://doi.org/10.1016/j.sna.2007.04.025
Abstract
No abstract availableKeywords
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