Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
Open Access
- 26 May 2012
- journal article
- research article
- Published by Springer Science and Business Media LLC in Biomedical Microdevices
- Vol. 14 (5), 819-828
- https://doi.org/10.1007/s10544-012-9661-8
Abstract
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.This publication has 23 references indexed in Scilit:
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