Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
Top Cited Papers
- 3 June 2005
- journal article
- other
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 308 (5727), 1442-1446
- https://doi.org/10.1126/science.1111041
Abstract
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.Keywords
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