Organic–Inorganic Nanocomposites: Unique Resists for Nanolithography

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17 May 2001

journal article
review article
Published by Wiley in Advanced Materials

Vol. 13 (10), 703-714
https://doi.org/10.1002/1521-4095(200105)13:10<703::aid-adma703>3.0.co;2-a

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Cited by 92 articles