Comparison of tilting and piston mirror elements for 65nm node spatial light modulator optical maskless lithography
- 1 November 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 22 (6), 3038-3042
- https://doi.org/10.1116/1.1824063
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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