Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor
- 13 March 2006
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (11), 113508
- https://doi.org/10.1063/1.2186396
Abstract
We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated and it has been shown that it is possible to pattern the composite by standard UV photolithography. The composite material has been integrated into an SU-8 microcantilever and the polymer composite has been demonstrated to be piezoresistive with gauge factors around 15–20. Since SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, this polymer based strain sensor is more sensitive than a similar silicon based cantilever sensor.This publication has 11 references indexed in Scilit:
- Polymeric mechanical sensors with piezoresistive readout integrated in a microfluidic systemPublished by SPIE-Intl Soc Optical Eng ,2003
- Atomic force microscopy using a piezoresistive cantileverPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Polymer-based stress sensor with integrated readoutJournal of Physics D: Applied Physics, 2002
- Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensingJournal of Micromechanics and Microengineering, 2002
- Micromechanical cantilever-based biosensorsSensors and Actuators B: Chemical, 2001
- Nanoelectromechanical SystemsScience, 2000
- Polyurea microcapsules with different structures: Preparation and propertiesJournal of Applied Polymer Science, 2000
- Environmental sensors based on micromachined cantilevers with integrated read-outUltramicroscopy, 2000
- Soft, entirely photoplastic probes for scanning force microscopyReview of Scientific Instruments, 1999
- Measurement and interpretation of nonuniversal critical exponents in disordered conductor–insulator compositesPhysical Review B, 1995