Surface micromachined magnetic actuators

Abstract

A surface micromachined micromagnetic actuator (also called a magnetic flap) as an integrated part of an active micro electromechanical fluid control system is described. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100 /spl mu/m) with magnetic forces in stationary air. Special microfabrication issues involved in fabricating magnetic flaps with large areas are discussed. Mechanical characterizations of the flaps, including the intrinsic stresses of thin film materials and frequency response, are presented. Thermal actuation is capable of producing large flap displacements and has been theoretically and experimentally studied.