Influence of the Parameters of Cluster Ions on the Formation of Nanostructures on the KTP Surface
Open Access
- 23 January 2021
- journal article
- research article
- Published by MDPI AG in Applied Nano
- Vol. 2 (1), 25-30
- https://doi.org/10.3390/applnano2010003
Abstract
In this work, the formation of periodic nanostructures on the surface of potassium titanyl phosphate (KTP) has been demonstrated. The surface of KTP single crystals after the processing of argon cluster ions with different energy per cluster atom E/Nmean = 12.5 and 110 eV/atom has been studied using atomic force microscopy (AFM). To characterize the nanostructures, the power spectral density (PSD) functions have been used. The features of the formation of periodic nanostructures are revealed depending on the incident angle of clusters and different energy per atom in clusters.Keywords
Funding Information
- Ministry of Education and Science of the Russian Federation (FSUS-2020-0039)
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