Nano structure formation by gas cluster ion beam irradiations at oblique incidence
- 1 May 2005
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 232 (1-4), 212-216
- https://doi.org/10.1016/j.nimb.2005.03.047
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- A numerical simulation of the evolution of nanometer-scale surface topography generated by ion millingJournal of Vacuum Science & Technology A, 1998
- Ripple Structure on Ag(110) Surface Induced by Ion SputteringPhysical Review Letters, 1997
- Roughening and ripple instabilities on ion-bombarded SiPhysical Review B, 1996
- Roughness study of ion-irradiated silica glass surfaceApplied Surface Science, 1996
- Roughening instability and ion-induced viscous relaxation of SiO2 surfacesJournal of Applied Physics, 1994
- Roughening instability and evolution of the Ge(001) surface during ion sputteringPhysical Review Letters, 1994
- Auger electron spectroscopy and secondary ion mass spectrometry depth profiling with sample rotationThin Solid Films, 1992
- Ion-induced topography, depth resolution, and ion yield during secondary ion mass spectrometry depth profiling of a GaAs/AlGaAs superlattice: Effects of sample rotationJournal of Vacuum Science & Technology A, 1991
- Theory of ripple topography induced by ion bombardmentJournal of Vacuum Science & Technology A, 1988
- Secondary ion yield changes in Si and GaAs due to topography changes during O+2 or Cs+ ion bombardmentJournal of Vacuum Science & Technology A, 1988