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New architecture for laser pattern generators for 130 nm and beyond
Home
Publications
New architecture for laser pattern generators for 130 nm and beyond
New architecture for laser pattern generators for 130 nm and beyond
UL
Ulric B. Ljungblad
Ulric B. Ljungblad
TS
Torbjoern Sandstrom
Torbjoern Sandstrom
HB
Hans Buhre
Hans Buhre
PD
Peter Duerr
Peter Duerr
HL
Hubert K. Lakner
Hubert K. Lakner
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22 January 2001
conference paper
conference paper
Published by
SPIE-Intl Soc Optical Eng
p.
16-21
https://doi.org/10.1117/12.410691
Abstract
No abstract available
Keywords
LASERS
Cited by 7 articles