On light-induced effect in amorphous hydrogenated silicon
- 1 February 1981
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (2), 859-860
- https://doi.org/10.1063/1.328849
Abstract
Amorphous silicon films prepared by a discharge of 10% SiH4‐90% H2 mixture are shown to have properties comparable to those prepared from 100% SiH4. These films are found to be quite stable against prolonged light exposure.Keywords
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