Spectral characteristics of chromatic confocal imaging systems
- 3 November 2014
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 53 (32), 7634-7642
- https://doi.org/10.1364/ao.53.007634
Abstract
We present signal-generation models for chromatic confocal imaging systems with illumination and detection pinholes of finite size: a collinear model that considers neither aberrations nor diffraction effects, a geometrical model that accounts for aberrations, and a wave optical model covering both aberrations and diffraction effects. These models are aimed at describing the spectral response of multipoint sensor systems with field-dependent aberrations and vignetting effects. They are suitable for single- and double-pass systems with either diffusely or specularly reflecting surfaces under test. We show experimental results to verify our models.Keywords
Funding Information
- Deutsche Forschungsgemeinschaft (DFG) (2667/1-1, SI 573/9-1)
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