Temperature compensation of silicon resonant pressure sensor
- 31 December 1996
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 57 (3), 179-182
- https://doi.org/10.1016/s0924-4247(97)80111-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- High accuracy pressure measurement with a silicon resonant sensorSensors and Actuators A: Physical, 1993
- A capacitively excited and detected resonant pressure sensor with temperature compensationSensors and Actuators A: Physical, 1992
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985