Enhanced Boiling of FC-72 on Silicon Chips With Micro-Pin-Fins and Submicron-Scale Roughness
- 21 August 2001
- journal article
- Published by ASME International in Journal of Heat Transfer
- Vol. 124 (2), 383-390
- https://doi.org/10.1115/1.1447937
Abstract
Experiments were conducted to study the effects of micro-pin-fins and submicron-scale roughness on the boiling heat transfer from a silicon chip immersed in a pool of degassed and gas-dissolved FC-72. Square pin-fins with fin dimensions of 50×50×60μm3 (width×thickness×height) and submicron-scale roughness (RMS roughness of 25 to 32 nm) were fabricated on the surface of square silicon chip 10×10×0.5mm3 by use of microelectronic fabrication techniques. Experiments were conducted at the liquid subcoolings of 0, 3, 25, and 45 K. Both the micro-pin-finned chip and the chip with submicron-scale roughness showed a considerable heat transfer enhancement as compared to a smooth chip in the nucleate boiling region. The chip with submicron-scale roughness showed a higher heat transfer performance than the micro-pin-finned chip in the low-heat-flux region. The micro-pin-finned chip showed a steep increase in the heat flux with increasing wall superheat. This chip showed a higher heat transfer performance than the chip with submicron-scale roughness in the high-heat-flux region. The micro-pin-finned chip with submicron-scale roughness on it showed the highest heat transfer performance in the high-heat-flux region. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content, it was little affected by the liquid subcooling.Keywords
This publication has 13 references indexed in Scilit:
- Effects of Size and Number Density of Micro-reentrant Cavities on Boiling Heat Transfer from a Silicon Chip Immersed in Degassed and Gas-dissolved FC-72Journal of Enhanced Heat Transfer, 1999
- Heater Orientation Effects on Pool Boiling of Micro-Porous-Enhanced Surfaces in Saturated FC-72Journal of Heat Transfer, 1996
- Gas-Saturated Pool Boiling Heat Transfer From Smooth and Microporous Surfaces in FC-72Journal of Heat Transfer, 1996
- A Painting Technique to Enhance Pool Boiling Heat Transfer in Saturated FC-72Journal of Heat Transfer, 1995
- A dielectric surface coating technique to enhance boiling heat transfer from high power microelectronicsIEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, 1995
- Thermal Management of Electronic Components with Dielectric Liquids.JSME International Journal Series B, 1993
- A technique for enhancing boiling heat transfer with application to cooling of electronic equipmentIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1992
- Effects of boiling history on a microconfigured surface in a dielectric liquidInternational Communications in Heat and Mass Transfer, 1990
- Experimental investigation of nucleate boiling incipience with a highly-wetting dielectric fluid (R-113)International Journal of Heat and Mass Transfer, 1990
- Microelectronic Cooling by Enhanced Pool Boiling of a Dielectric Fluorocarbon LiquidJournal of Heat Transfer, 1989