Ultra-High Vacuum Scanning Thermal Microscopy for Nanometer Resolution Quantitative Thermometry
- 24 April 2012
- journal article
- Published by American Chemical Society (ACS) in ACS Nano
- Vol. 6 (5), 4248-4257
- https://doi.org/10.1021/nn300774n
Abstract
Understanding energy dissipation at the nanoscale requires the ability to probe temperature fields with nanometer resolution. Here, we describe an ultra-high vacuum (UHV)-based scanning thermal microscope (SThM) technique that is capable of quantitatively mapping temperature fields with ∼15 mK temperature resolution and ∼10 nm spatial resolution. In this technique, a custom fabricated atomic force microscope (AFM) cantilever, with a nanoscale Au–Cr thermocouple integrated into the tip of the probe, is used to measure temperature fields of surfaces. Operation in an UHV environment eliminates parasitic heat transport between the tip and the sample enabling quantitative measurement of temperature fields on metal and dielectric surfaces with nanoscale resolution. We demonstrate the capabilities of this technique by directly imaging thermal fields in the vicinity of a 200 nm wide, self-heated, Pt line. Our measurements are in excellent agreement with computational results—unambiguously demonstrating the quantitative capabilities of the technique. UHV-SThM techniques will play an important role in the study of energy dissipation in nanometer-sized electronic and photonic devices and the study of phonon and electron transport at the nanoscale.Keywords
This publication has 34 references indexed in Scilit:
- Nanoscale Joule heating, Peltier cooling and current crowding at graphene–metal contactsNature Nanotechnology, 2011
- Low-Frequency Acoustic Phonon Temperature Distribution in Electrically Biased GrapheneNano Letters, 2010
- The effect of electrode heat sink in organic-electronic devicesApplied Physics Letters, 2008
- Thermoreflectance based thermal microscopeReview of Scientific Instruments, 2005
- Imaging Joule heating in a conjugated-polymer light-emitting diode using a scanning thermal microscopeApplied Physics Letters, 2004
- Mesoscopic thermal transport and energy dissipation in carbon nanotubesPhysica B: Condensed Matter, 2002
- Scanning thermal microscopy of carbon nanotubes using batch-fabricated probesApplied Physics Letters, 2000
- SCANNING THERMAL MICROSCOPYAnnual Review of Materials Science, 1999
- Scanning thermal microscopy of a vertical-cavity surface-emitting laserApplied Physics Letters, 1997
- Optical absorption microscopy and spectroscopy with nanometre resolutionNature, 1989