Effect of crystalline structure on optical and electrical properties of IWOH films fabricated by low-damage reactive plasma deposition at room temperature
- 30 November 2020
- journal article
- research article
- Published by Elsevier BV in Journal of Alloys and Compounds
- Vol. 843, 155151
- https://doi.org/10.1016/j.jallcom.2020.155151
Abstract
No abstract availableKeywords
Funding Information
- Strategic Priority Research Program and the Joint Fund of Chinese Academy of Science (XDA17020403, 6131A01141604)
- Science and Technology Commission of Shanghai (17dz1201100)
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