Measurement of Sheet Resistivities with the Four-Point Probe
- 1 May 1958
- journal article
- website
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
- Vol. 37 (3), 711-718
- https://doi.org/10.1002/j.1538-7305.1958.tb03883.x
Abstract
Correction factors are evaluated for the measurement of sheet resistirities on two-dimensional rectangular and circular samples with the four-point probe. Diffused surface layers can be treated as two-dimensional structures, but the factors are also ...This publication has 1 reference indexed in Scilit:
- Resistivity Measurements on Germanium for TransistorsProceedings of the IRE, 1954