Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
- 2 October 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (1), 29-34
- https://doi.org/10.1088/0960-1317/15/1/005
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- 2.5-inch disk patterned media prepared by an artificially assisted self-assembling methodIEEE Transactions on Magnetics, 2002
- Latching micromagnetic relaysJournal of Microelectromechanical Systems, 2001
- Fabrication of integrated micromachined polymer magnetPublished by SPIE-Intl Soc Optical Eng ,2001
- Micro magnetic silicone elastomer membrane actuatorSensors and Actuators A: Physical, 2001
- A DNA array sensor utilizing magnetic microbeads and magnetoelectronic detectionJournal of Magnetism and Magnetic Materials, 2001
- Fabrication of patterned media for high density magnetic storageJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Development of magnetic materials and processing techniques applicable to integrated micromagnetic devicesJournal of Micromechanics and Microengineering, 1998
- Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devicesPublished by SPIE-Intl Soc Optical Eng ,1998
- Magnetic and mechanical properties of micromachined strontium ferrite/polyimide compositesJournal of Microelectromechanical Systems, 1997
- Submicron patterning of thin cobalt films for magnetic storageJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994