CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
Open Access
- 27 April 2010
- Vol. 10 (5), 4180-4193
- https://doi.org/10.3390/s100504180
Abstract
The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.Keywords
This publication has 34 references indexed in Scilit:
- c-axis inclined AlN film growth in planar system for shear wave devicesDiamond and Related Materials, 2008
- Formation of irreversibly bound annexin A1 protein domains on POPC/POPS solid supported membranesBiochimica et Biophysica Acta (BBA) - Biomembranes, 2008
- Surface acoustic wave sensors in the bioanalytical field: Recent trends and challengesAnalytica Chimica Acta, 2007
- Towards integrated and sensitive surface plasmon resonance biosensors: A review of recent progressBiosensors and Bioelectronics, 2007
- Lipoate-based imprinted self-assembled molecular thin films for biosensor applicationsBiosensors and Bioelectronics, 2007
- Nanomechanical biosensors: a new sensing toolTrAC Trends in Analytical Chemistry, 2006
- Simultaneous Surface Plasmon Resonance and Quartz Crystal Microbalance with Dissipation Monitoring Measurements of Biomolecular Adsorption Events Involving Structural Transformations and Variations in Coupled WaterAnalytical Chemistry, 2004
- ‘Missing mass’ effect in biosensor's QCM applicationsBiosensors and Bioelectronics, 2002
- A comparative study of protein adsorption on titanium oxide surfaces using in situ ellipsometry, optical waveguide lightmode spectroscopy, and quartz crystal microbalance/dissipationColloids and Surfaces B: Biointerfaces, 2002
- Acoustic wave technology sensorsIEEE Transactions on Microwave Theory and Techniques, 2001