Achromatic spatial frequency multiplication: A method for production of nanometer-scale periodic structures
- 1 November 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 23 (6), 2705-2710
- https://doi.org/10.1116/1.2121735
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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