Impact of the vertical SOI 'DELTA' structure on planar device technology
- 1 June 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 38 (6), 1419-1424
- https://doi.org/10.1109/16.81634
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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