Kinoform Array Illuminators in Fused Silica
- 1 April 1993
- journal article
- research article
- Published by Informa UK Limited in Journal of Modern Optics
- Vol. 40 (4), 723-732
- https://doi.org/10.1080/09500349314550771
Abstract
High-efficiency (> 90%) multilevel grating array illuminators are designed using nonlinear parametric optimization and analysed using rigorous electromagnetic grating theory. Designs with eight and 16 relief depth levels are fabricated in fused silica using reactive ion etching and photolithography with three and four electron-beam generated binary amplitude masks, respectively.Keywords
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