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The Oxidation of Shaped Silicon Surfaces
Home
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The Oxidation of Shaped Silicon Surfaces
The Oxidation of Shaped Silicon Surfaces
RM
R. B. Marcus
R. B. Marcus
TS
T. T. Sheng
T. T. Sheng
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1 June 1982
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 129
(6)
,
1278-1282
https://doi.org/10.1149/1.2124118
Abstract
No abstract available
Cited by 211 articles