Method for manufacturing embedded variable capacitors in low-temperature cofired ceramic substrate
- 1 January 2008
- journal article
- research article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 44 (2), 94-95
- https://doi.org/10.1049/el:20083014
Abstract
A method for manufacturing embedded variable capacitors (varactors) inside a low-temperature cofired ceramic substrate is presented. A varactor is fabricated by filling a via hole with ferroelectric barium strontium titanate paste. The measured capacitance of the varactor changed from 1.47 to 0.97 pF and the Q factor from 18.2 to 31.5 at 1 GHz when the bias voltage was increased from 0 to 200 V.Keywords
This publication has 1 reference indexed in Scilit:
- Ultrawide-band tunable true-time delay lines using ferroelectric varactorsIEEE Transactions on Microwave Theory and Techniques, 2005