Capacitive-type humidity sensors fabricated using the offset lithographic printing process
- 12 September 2002
- journal article
- Published by Elsevier BV in Sensors and Actuators B: Chemical
- Vol. 87 (2), 226-232
- https://doi.org/10.1016/s0925-4005(02)00240-x
Abstract
This paper reports on the fabrication of a novel capacitive-type relative humidity sensor of which the electrode films are deposited using the high speed printing process, offset lithography. Parallel-plate capacitor sensor structures have been formed with a number of humidity sensitive polymers including polyimide and polyethersulphone (PES). Details of the fabrication process and sensor characteristics such as linearity, sensitivity and response time are included.Keywords
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