High‐Damping Carbon Nanotube Hinged Micromirrors
- 17 April 2012
- Vol. 8 (13), 2006-2010
- https://doi.org/10.1002/smll.201102683
Abstract
New developments in digital mirror devices (DMDs) require suspension hinges with a good damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique properties. Herein it is shown how CNT hinges can be integrated in micromirrors. The image illustrates a micromirror with a CNT suspension, and a typical overdamped stepresponse (Q-factor < 0.5).status: publisheKeywords
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