Rutherford backscattering and transmission electron microscopy analysis of Al/AlxOy vacuum-deposited laminates
- 1 April 1986
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6), 260-264
- https://doi.org/10.1016/0168-583x(86)90298-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Structure and mechanical properties of Al/AlxOy vacuum- deposited laminatesThin Solid Films, 1978
- Rate and pressure dependence of contaminants in vacuum-deposited aluminum filmsJournal of Vacuum Science and Technology, 1978