Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling
- 31 May 1994
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 43 (1-3), 346-350
- https://doi.org/10.1016/0924-4247(93)00704-8
Abstract
No abstract availableKeywords
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