BrF3 dry release technology for large freestanding parylene microstructures and electrostatic actuators
- 1 April 2002
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 97-98, 771-775
- https://doi.org/10.1016/s0924-4247(02)00019-5
Abstract
No abstract availableKeywords
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