Microsphere-Coupled Scanning Laser Confocal Nanoscope for Sub-Diffraction-Limited Imaging at 25 nm Lateral Resolution in the Visible Spectrum

Abstract

We report a direct optical super-resolution imaging approach with 25 nm (∼ λ/17) lateral resolution under 408 nm wavelength illumination by combining fused silica and polystyrene microspheres with a conventional scanning laser confocal microscope (SLCM). The microsphere deposited on the target surface generates a nanoscale central lobe illuminating a sub-diffraction-limited cross-section located on the target surface. The SLCM confocal pinhole isolates the reflected light from the near-field subdiffractive cross-section and suppresses the noises from the side lobe and the far-field paraxial focal point. The structural detail of the subdiffractive cross-section is therefore captured, and the 2D target surface near the bottom of microspheres can be imaged by intensity-based point scanning.