Direct fabricating patterns using stamping transfer process with PDMS mold of hydrophobic nanostructures on surface of micro-cavity
- 30 June 2011
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 88 (6), 849-854
- https://doi.org/10.1016/j.mee.2010.08.006
Abstract
No abstract availableKeywords
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