A low cost monolithic accelerometer; product/technology update

1 January 1992

conference paper
conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

No. 01631918,p. 501-504
https://doi.org/10.1109/iedm.1992.307410

Abstract

Described is a complete monolithic accelerometer, which combines a surface micromachined polysilicon sensor with BiMOS interface circuitry. As much as possible, the device exploits existing high volume wafer fabrication technology. Ultimately, this scheme should make acceleration sensing a commodity function, with signal span accuracy approaching 5%. The circuit architecture is reviewed and recent characterization results reported.

Keywords

ACCELERATION MEASUREMENT
BIMOS INTEGRATED CIRCUITS
INTEGRATED CIRCUIT FABRICATION
SILICON

This publication has 1 reference indexed in Scilit:

A low cost monolithic accelerometer
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003

Cited by 30 articles