A model for electrical conduction in metal-ferroelectric-metal thin-film capacitors
- 15 January 1994
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 75 (2), 1014-1022
- https://doi.org/10.1063/1.356508
Abstract
Time‐zero current‐voltage characteristics and time‐dependent current behavior of metal‐ferroelectric‐metal (Pt‐PZT‐Pt) capacitor structures have been studied. Under constant‐voltage stressing, the current density through the 1500‐Å‐thick lead‐zirconate‐titanate (PZT) film exhibits a power‐law dependence on time, with the exponent (∼0.33) independent of temperature and voltage. Electrodematerial dependence of current density indicates that the conventional model of trap‐limited single‐carrier injection over nonblocking contacts is inadequate to explain the time‐zero current. A change in top electrodematerial from Pt to In leads to the observation of work‐function‐driven Schottky contacts between the metal and ferroelectric. The current‐voltage characteristics fit a two‐carrier injection metal‐semiconductor‐metal model incorporating blocking contacts, with distinct low‐ and high‐current regimes (PZT is assumed to be p‐type and trap‐free in this model). Temperature‐dependent I‐V measurements indicate a Pt‐PZT barrier height of 0.6 eV and an acceptor doping level of ∼1018 cm−3 in PZT. The implications of this model on the optimization of ferroelectriccapacitors for dynamic random access memory applications are discussed.Keywords
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