Lithographically Fabricated Nanopore-Based Electrodes for Electrochemistry

Abstract

We report a new technique for fabricating electrodes for electrochemical applications with lateral dimensions in the range 15−200 nm and a reproducible, well-defined geometry. This technique allows determining the electrode size by electron microscopy prior to electrochemical measurements and without contamination of the metal electrode. We measured the diffusion-limited current with stepped-current voltammetry and showed that its dependence on electrode size can be quantitatively understood if the known geometry of the electrodes is explicitly taken into account.