Ion beam synthesis of aluminium nitride: characterisation of thin AIN layers formed in microelectronics aluminium
- 1 November 1995
- journal article
- Published by SAGE Publications in Materials Science and Technology
- Vol. 11 (11), 1187-1190
- https://doi.org/10.1179/mst.1995.11.11.1187
Abstract
No abstract availableKeywords
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