Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
- 6 April 2006
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Comparison of RSG-MOSFET and capacitive MEMS resonator detectionElectronics Letters, 2005
- Modeling and design of a low-voltage SOI suspended-gate MOSFET (SG-MOSFET) with a metal-over-gate architecturePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003