Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
Continuous-membrane surface-micromachined silicon deformable mirror
Home
Publications
Continuous-membrane surface-micromachined silicon deformable mirror
Continuous-membrane surface-micromachined silicon deformable mirror
Thomas G. Bifano
Thomas G. Bifano
RM
Raji Krishnamoorthy Mali
Raji Krishnamoorthy Mali
JD
John Kyle Dorton
John Kyle Dorton
JP
Julie Perreault
Julie Perreault
NV
Nelsimar Vandelli
Nelsimar Vandelli
MH
Mark N. Horenstein
Mark N. Horenstein
DC
David A. Castan˜on
David A. Castan˜on
Publisher Website
Google Scholar
Cite
Download
Share
Download
1 May 1997
journal article
Published by
SPIE-Intl Soc Optical Eng
in
Optical Engineering
Vol. 36
(5)
,
1354-1360
https://doi.org/10.1117/1.601598
Abstract
The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. ©
1997 Society of Photo-Optical Instrumentation Engineers.
Keywords
BEHAVIOR
MODEL
FINITE
SOCIETY
PLANAR
MICROMACHINED
PHOTO
DEFORMABLE MIRROR
DEFLECTIONS
All Articles
Open Access
Cited by 79 articles