Morphology control of thin LiCoO2 films fabricated using the electrostatic spray deposition (ESD) technique

Abstract

Electrostatic spray deposition (ESD) is a technique recently developed for the fabrication of inorganic thin films. Several process steps involved in an ESD process are overviewed. A variety of surface morphologies of LiCoO₂ thin layers fabricated by this technique are presented, indicating correlations between the morphologies and deposition conditions.